4/3/2011	12:21:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2011	12:21:05 AM	Recipe started at 12:21 AM
4/3/2011	12:21:05 AM	H2 valve closed
4/3/2011	12:21:05 AM	BCl3 valve closed
4/3/2011	12:21:05 AM	PH3 valve closed
4/3/2011	12:21:05 AM	SiCl4 pre valve closed
4/3/2011	12:21:05 AM	SiCl4 post valve closed
4/3/2011	12:21:05 AM	Main Vac valve closed
4/3/2011	12:21:05 AM	Bypass valve closed
4/3/2011	12:21:05 AM	Bubbler valve closed
4/3/2011	12:21:05 AM	Helium valve opened
4/3/2011	12:21:05 AM	Helium MFC set to  500.000000
4/3/2011	12:21:05 AM	H2 MFC set to  0.000000
4/3/2011	12:21:05 AM	BCl3 MFC set to  0.000000
4/3/2011	12:21:05 AM	PHl3 MFC set to  0.000000
4/3/2011	12:21:05 AM	SiCl4 MFC set to  0.000000
4/3/2011	12:21:05 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	12:21:05 AM	Tube furnace set to 0
4/3/2011	12:21:15 AM	Helium valve closed
4/3/2011	12:21:15 AM	H2 valve closed
4/3/2011	12:21:15 AM	BCl3 valve closed
4/3/2011	12:21:15 AM	PH3 valve closed
4/3/2011	12:21:15 AM	SiCl4 pre valve closed
4/3/2011	12:21:15 AM	SiCl4 post valve closed
4/3/2011	12:21:15 AM	Main Vac valve closed
4/3/2011	12:21:15 AM	Bypass valve closed
4/3/2011	12:21:15 AM	Bubbler valve closed
4/3/2011	12:21:15 AM	Helium MFC set to  0.000000
4/3/2011	12:21:15 AM	H2 MFC set to  0.000000
4/3/2011	12:21:15 AM	BCl3 MFC set to  0.000000
4/3/2011	12:21:15 AM	PHl3 MFC set to  0.000000
4/3/2011	12:21:15 AM	SiCl4 MFC set to  0.000000
4/3/2011	12:21:15 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	12:21:15 AM	Tube furnace set to 0
4/3/2011	12:21:16 AM	Run finished at 12:21 AM
4/3/2011	12:21:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2011	12:24:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	12:24:04 AM	Recipe started at 12:24 AM
4/3/2011	12:24:04 AM	Helium valve closed
4/3/2011	12:24:04 AM	H2 valve closed
4/3/2011	12:24:04 AM	BCl3 valve closed
4/3/2011	12:24:04 AM	PH3 valve closed
4/3/2011	12:24:04 AM	SiCl4 pre valve closed
4/3/2011	12:24:04 AM	SiCl4 post valve closed
4/3/2011	12:24:04 AM	Main Vac valve closed
4/3/2011	12:24:04 AM	Bubbler valve closed
4/3/2011	12:24:04 AM	Bypass valve opened
4/3/2011	12:24:04 AM	Helium MFC set to  0.000000
4/3/2011	12:24:04 AM	H2 MFC set to  0.000000
4/3/2011	12:24:04 AM	BCl3 MFC set to  0.000000
4/3/2011	12:24:04 AM	PHl3 MFC set to  0.000000
4/3/2011	12:24:04 AM	SiCl4 MFC set to  0.000000
4/3/2011	12:24:04 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	12:24:04 AM	Tube furnace set to 0
4/3/2011	12:24:37 AM	Helium valve closed
4/3/2011	12:24:37 AM	H2 valve closed
4/3/2011	12:24:37 AM	BCl3 valve closed
4/3/2011	12:24:37 AM	PH3 valve closed
4/3/2011	12:24:37 AM	SiCl4 pre valve closed
4/3/2011	12:24:37 AM	SiCl4 post valve closed
4/3/2011	12:24:37 AM	Bubbler valve closed
4/3/2011	12:24:37 AM	Main Vac valve opened
4/3/2011	12:24:37 AM	Bypass valve opened
4/3/2011	12:24:37 AM	Helium MFC set to  0.000000
4/3/2011	12:24:37 AM	H2 MFC set to  0.000000
4/3/2011	12:24:37 AM	BCl3 MFC set to  0.000000
4/3/2011	12:24:37 AM	PHl3 MFC set to  0.000000
4/3/2011	12:24:37 AM	SiCl4 MFC set to  0.000000
4/3/2011	12:24:37 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	12:24:37 AM	Tube furnace set to 0
4/3/2011	12:24:37 AM	Run finished at 12:24 AM
4/3/2011	12:24:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	10:18:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2011	10:18:32 AM	Recipe started at 10:18 AM
4/3/2011	10:18:32 AM	H2 valve closed
4/3/2011	10:18:32 AM	BCl3 valve closed
4/3/2011	10:18:32 AM	PH3 valve closed
4/3/2011	10:18:32 AM	SiCl4 pre valve closed
4/3/2011	10:18:32 AM	SiCl4 post valve closed
4/3/2011	10:18:32 AM	Main Vac valve closed
4/3/2011	10:18:32 AM	Bypass valve closed
4/3/2011	10:18:32 AM	Bubbler valve closed
4/3/2011	10:18:32 AM	Helium valve opened
4/3/2011	10:18:32 AM	Helium MFC set to  500.000000
4/3/2011	10:18:32 AM	H2 MFC set to  0.000000
4/3/2011	10:18:32 AM	BCl3 MFC set to  0.000000
4/3/2011	10:18:32 AM	PHl3 MFC set to  0.000000
4/3/2011	10:18:32 AM	SiCl4 MFC set to  0.000000
4/3/2011	10:18:32 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	10:18:32 AM	Tube furnace set to 0
4/3/2011	10:19:53 AM	Helium valve closed
4/3/2011	10:19:53 AM	H2 valve closed
4/3/2011	10:19:53 AM	BCl3 valve closed
4/3/2011	10:19:53 AM	PH3 valve closed
4/3/2011	10:19:53 AM	SiCl4 pre valve closed
4/3/2011	10:19:53 AM	SiCl4 post valve closed
4/3/2011	10:19:53 AM	Main Vac valve closed
4/3/2011	10:19:53 AM	Bypass valve closed
4/3/2011	10:19:53 AM	Bubbler valve closed
4/3/2011	10:19:53 AM	Helium MFC set to  0.000000
4/3/2011	10:19:53 AM	H2 MFC set to  0.000000
4/3/2011	10:19:53 AM	BCl3 MFC set to  0.000000
4/3/2011	10:19:53 AM	PHl3 MFC set to  0.000000
4/3/2011	10:19:53 AM	SiCl4 MFC set to  0.000000
4/3/2011	10:19:53 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	10:19:53 AM	Tube furnace set to 0
4/3/2011	10:19:53 AM	Run finished at 10:19 AM
4/3/2011	10:19:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2011	10:27:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	10:27:10 AM	Recipe started at 10:27 AM
4/3/2011	10:27:10 AM	Helium valve closed
4/3/2011	10:27:10 AM	H2 valve closed
4/3/2011	10:27:10 AM	BCl3 valve closed
4/3/2011	10:27:10 AM	PH3 valve closed
4/3/2011	10:27:10 AM	SiCl4 pre valve closed
4/3/2011	10:27:10 AM	SiCl4 post valve closed
4/3/2011	10:27:10 AM	Main Vac valve closed
4/3/2011	10:27:10 AM	Bubbler valve closed
4/3/2011	10:27:10 AM	Bypass valve opened
4/3/2011	10:27:10 AM	Helium MFC set to  0.000000
4/3/2011	10:27:10 AM	H2 MFC set to  0.000000
4/3/2011	10:27:10 AM	BCl3 MFC set to  0.000000
4/3/2011	10:27:10 AM	PHl3 MFC set to  0.000000
4/3/2011	10:27:10 AM	SiCl4 MFC set to  0.000000
4/3/2011	10:27:10 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	10:27:10 AM	Tube furnace set to 0
4/3/2011	10:27:43 AM	Helium valve closed
4/3/2011	10:27:43 AM	H2 valve closed
4/3/2011	10:27:43 AM	BCl3 valve closed
4/3/2011	10:27:43 AM	PH3 valve closed
4/3/2011	10:27:43 AM	SiCl4 pre valve closed
4/3/2011	10:27:43 AM	SiCl4 post valve closed
4/3/2011	10:27:43 AM	Bubbler valve closed
4/3/2011	10:27:43 AM	Main Vac valve opened
4/3/2011	10:27:43 AM	Bypass valve opened
4/3/2011	10:27:43 AM	Helium MFC set to  0.000000
4/3/2011	10:27:43 AM	H2 MFC set to  0.000000
4/3/2011	10:27:43 AM	BCl3 MFC set to  0.000000
4/3/2011	10:27:43 AM	PHl3 MFC set to  0.000000
4/3/2011	10:27:43 AM	SiCl4 MFC set to  0.000000
4/3/2011	10:27:43 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	10:27:43 AM	Tube furnace set to 0
4/3/2011	10:27:43 AM	Run finished at 10:27 AM
4/3/2011	10:27:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	10:45:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2011	10:45:06 AM	Recipe started at 10:45 AM
4/3/2011	10:45:06 AM	H2 valve closed
4/3/2011	10:45:06 AM	BCl3 valve closed
4/3/2011	10:45:06 AM	PH3 valve closed
4/3/2011	10:45:06 AM	SiCl4 pre valve closed
4/3/2011	10:45:06 AM	SiCl4 post valve closed
4/3/2011	10:45:06 AM	Main Vac valve closed
4/3/2011	10:45:06 AM	Bypass valve closed
4/3/2011	10:45:06 AM	Bubbler valve closed
4/3/2011	10:45:06 AM	Helium valve opened
4/3/2011	10:45:06 AM	Helium MFC set to  500.000000
4/3/2011	10:45:06 AM	H2 MFC set to  0.000000
4/3/2011	10:45:06 AM	BCl3 MFC set to  0.000000
4/3/2011	10:45:06 AM	PHl3 MFC set to  0.000000
4/3/2011	10:45:06 AM	SiCl4 MFC set to  0.000000
4/3/2011	10:45:06 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	10:45:06 AM	Tube furnace set to 0
4/3/2011	10:46:27 AM	Helium valve closed
4/3/2011	10:46:27 AM	H2 valve closed
4/3/2011	10:46:27 AM	BCl3 valve closed
4/3/2011	10:46:27 AM	PH3 valve closed
4/3/2011	10:46:27 AM	SiCl4 pre valve closed
4/3/2011	10:46:27 AM	SiCl4 post valve closed
4/3/2011	10:46:27 AM	Main Vac valve closed
4/3/2011	10:46:27 AM	Bypass valve closed
4/3/2011	10:46:27 AM	Bubbler valve closed
4/3/2011	10:46:27 AM	Helium MFC set to  0.000000
4/3/2011	10:46:27 AM	H2 MFC set to  0.000000
4/3/2011	10:46:27 AM	BCl3 MFC set to  0.000000
4/3/2011	10:46:27 AM	PHl3 MFC set to  0.000000
4/3/2011	10:46:27 AM	SiCl4 MFC set to  0.000000
4/3/2011	10:46:27 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	10:46:27 AM	Tube furnace set to 0
4/3/2011	10:46:27 AM	Run finished at 10:46 AM
4/3/2011	10:46:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2011	10:48:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	10:48:17 AM	Recipe started at 10:48 AM
4/3/2011	10:48:17 AM	Helium valve closed
4/3/2011	10:48:17 AM	H2 valve closed
4/3/2011	10:48:17 AM	BCl3 valve closed
4/3/2011	10:48:17 AM	PH3 valve closed
4/3/2011	10:48:17 AM	SiCl4 pre valve closed
4/3/2011	10:48:17 AM	SiCl4 post valve closed
4/3/2011	10:48:17 AM	Main Vac valve closed
4/3/2011	10:48:17 AM	Bubbler valve closed
4/3/2011	10:48:17 AM	Bypass valve opened
4/3/2011	10:48:17 AM	Helium MFC set to  0.000000
4/3/2011	10:48:18 AM	H2 MFC set to  0.000000
4/3/2011	10:48:18 AM	BCl3 MFC set to  0.000000
4/3/2011	10:48:18 AM	PHl3 MFC set to  0.000000
4/3/2011	10:48:18 AM	SiCl4 MFC set to  0.000000
4/3/2011	10:48:18 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	10:48:18 AM	Tube furnace set to 0
4/3/2011	10:48:49 AM	Helium valve closed
4/3/2011	10:48:49 AM	H2 valve closed
4/3/2011	10:48:49 AM	BCl3 valve closed
4/3/2011	10:48:49 AM	PH3 valve closed
4/3/2011	10:48:49 AM	SiCl4 pre valve closed
4/3/2011	10:48:49 AM	SiCl4 post valve closed
4/3/2011	10:48:49 AM	Bubbler valve closed
4/3/2011	10:48:49 AM	Main Vac valve opened
4/3/2011	10:48:49 AM	Bypass valve opened
4/3/2011	10:48:49 AM	Helium MFC set to  0.000000
4/3/2011	10:48:49 AM	H2 MFC set to  0.000000
4/3/2011	10:48:49 AM	BCl3 MFC set to  0.000000
4/3/2011	10:48:49 AM	PHl3 MFC set to  0.000000
4/3/2011	10:48:49 AM	SiCl4 MFC set to  0.000000
4/3/2011	10:48:49 AM	Bypass solenoid MFC set to  0.000000
4/3/2011	10:48:49 AM	Tube furnace set to 0
4/3/2011	10:48:49 AM	Run finished at 10:48 AM
4/3/2011	10:48:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	10:49:12 AM	Helium MFC set to  15.000000
4/3/2011	10:49:16 AM	Helium valve opened
4/3/2011	12:24:07 PM	Helium valve closed
4/3/2011	12:25:07 PM	Helium MFC set to  50.000000
4/3/2011	12:25:08 PM	Helium valve opened
4/3/2011	12:27:00 PM	Helium valve closed
4/3/2011	12:27:47 PM	Recipe started at 12:27 PM
4/3/2011	12:27:47 PM	Helium valve closed
4/3/2011	12:27:47 PM	BCl3 valve closed
4/3/2011	12:27:47 PM	PH3 valve closed
4/3/2011	12:27:47 PM	SiCl4 pre valve closed
4/3/2011	12:27:47 PM	SiCl4 post valve closed
4/3/2011	12:27:47 PM	Main Vac valve closed
4/3/2011	12:27:47 PM	Bypass valve closed
4/3/2011	12:27:47 PM	Bubbler valve closed
4/3/2011	12:27:47 PM	H2 valve opened
4/3/2011	12:27:47 PM	Helium MFC set to  0.000000
4/3/2011	12:27:47 PM	H2 MFC set to  500.000000
4/3/2011	12:27:47 PM	BCl3 MFC set to  0.000000
4/3/2011	12:27:47 PM	PHl3 MFC set to  0.000000
4/3/2011	12:27:47 PM	SiCl4 MFC set to  0.000000
4/3/2011	12:27:47 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	12:27:47 PM	Tube furnace set to 0
4/3/2011	12:29:10 PM	Helium valve closed
4/3/2011	12:29:10 PM	BCl3 valve closed
4/3/2011	12:29:10 PM	PH3 valve closed
4/3/2011	12:29:10 PM	SiCl4 pre valve closed
4/3/2011	12:29:10 PM	SiCl4 post valve closed
4/3/2011	12:29:10 PM	Main Vac valve closed
4/3/2011	12:29:10 PM	Bypass valve closed
4/3/2011	12:29:10 PM	H2 valve opened
4/3/2011	12:29:10 PM	Bubbler valve opened
4/3/2011	12:29:10 PM	Helium MFC set to  0.000000
4/3/2011	12:29:10 PM	H2 MFC set to  500.000000
4/3/2011	12:29:10 PM	BCl3 MFC set to  0.000000
4/3/2011	12:29:10 PM	PHl3 MFC set to  0.000000
4/3/2011	12:29:10 PM	SiCl4 MFC set to  0.000000
4/3/2011	12:29:10 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	12:29:11 PM	Tube furnace set to 1000
4/3/2011	12:49:11 PM	Helium valve closed
4/3/2011	12:49:11 PM	BCl3 valve closed
4/3/2011	12:49:11 PM	PH3 valve closed
4/3/2011	12:49:11 PM	Main Vac valve closed
4/3/2011	12:49:11 PM	Bypass valve closed
4/3/2011	12:49:11 PM	H2 valve opened
4/3/2011	12:49:11 PM	SiCl4 pre valve opened
4/3/2011	12:49:11 PM	SiCl4 post valve opened
4/3/2011	12:49:11 PM	Bubbler valve opened
4/3/2011	12:49:11 PM	Helium MFC set to  0.000000
4/3/2011	12:49:11 PM	H2 MFC set to  500.000000
4/3/2011	12:49:11 PM	BCl3 MFC set to  0.000000
4/3/2011	12:49:11 PM	PHl3 MFC set to  0.000000
4/3/2011	12:49:11 PM	SiCl4 MFC set to  50.000000
4/3/2011	12:49:11 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	12:49:11 PM	Tube furnace set to 1000
4/3/2011	1:09:11 PM	H2 valve closed
4/3/2011	1:09:11 PM	BCl3 valve closed
4/3/2011	1:09:11 PM	PH3 valve closed
4/3/2011	1:09:11 PM	SiCl4 pre valve closed
4/3/2011	1:09:11 PM	SiCl4 post valve closed
4/3/2011	1:09:11 PM	Main Vac valve closed
4/3/2011	1:09:11 PM	Bypass valve closed
4/3/2011	1:09:11 PM	Helium valve opened
4/3/2011	1:09:11 PM	Bubbler valve opened
4/3/2011	1:09:11 PM	Helium MFC set to  500.000000
4/3/2011	1:09:11 PM	H2 MFC set to  0.000000
4/3/2011	1:09:11 PM	BCl3 MFC set to  0.000000
4/3/2011	1:09:11 PM	PHl3 MFC set to  0.000000
4/3/2011	1:09:11 PM	SiCl4 MFC set to  0.000000
4/3/2011	1:09:11 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	1:09:11 PM	Tube furnace set to 0
4/3/2011	1:32:40 PM	H2 valve closed
4/3/2011	1:32:40 PM	BCl3 valve closed
4/3/2011	1:32:40 PM	PH3 valve closed
4/3/2011	1:32:40 PM	SiCl4 pre valve closed
4/3/2011	1:32:40 PM	SiCl4 post valve closed
4/3/2011	1:32:40 PM	Main Vac valve closed
4/3/2011	1:32:40 PM	Bypass valve closed
4/3/2011	1:32:40 PM	Helium valve opened
4/3/2011	1:32:40 PM	Bubbler valve opened
4/3/2011	1:32:40 PM	Helium MFC set to  500.000000
4/3/2011	1:32:40 PM	H2 MFC set to  0.000000
4/3/2011	1:32:40 PM	BCl3 MFC set to  0.000000
4/3/2011	1:32:40 PM	PHl3 MFC set to  0.000000
4/3/2011	1:32:40 PM	SiCl4 MFC set to  0.000000
4/3/2011	1:32:40 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	1:32:40 PM	Tube furnace set to 0
4/3/2011	1:32:48 PM	Helium valve closed
4/3/2011	1:32:48 PM	H2 valve closed
4/3/2011	1:32:48 PM	BCl3 valve closed
4/3/2011	1:32:48 PM	PH3 valve closed
4/3/2011	1:32:48 PM	SiCl4 pre valve closed
4/3/2011	1:32:48 PM	SiCl4 post valve closed
4/3/2011	1:32:48 PM	Main Vac valve closed
4/3/2011	1:32:48 PM	Bypass valve closed
4/3/2011	1:32:48 PM	Bubbler valve closed
4/3/2011	1:32:48 PM	Helium MFC set to  0.000000
4/3/2011	1:32:48 PM	H2 MFC set to  0.000000
4/3/2011	1:32:48 PM	BCl3 MFC set to  0.000000
4/3/2011	1:32:48 PM	PHl3 MFC set to  0.000000
4/3/2011	1:32:48 PM	SiCl4 MFC set to  0.000000
4/3/2011	1:32:48 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	1:32:48 PM	Tube furnace set to 0
4/3/2011	1:32:48 PM	Run finished at 1:32 PM
4/3/2011	1:34:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	1:34:16 PM	Recipe started at 1:34 PM
4/3/2011	1:34:16 PM	Helium valve closed
4/3/2011	1:34:16 PM	H2 valve closed
4/3/2011	1:34:16 PM	BCl3 valve closed
4/3/2011	1:34:16 PM	PH3 valve closed
4/3/2011	1:34:16 PM	SiCl4 pre valve closed
4/3/2011	1:34:16 PM	SiCl4 post valve closed
4/3/2011	1:34:16 PM	Main Vac valve closed
4/3/2011	1:34:16 PM	Bubbler valve closed
4/3/2011	1:34:16 PM	Bypass valve opened
4/3/2011	1:34:16 PM	Helium MFC set to  0.000000
4/3/2011	1:34:16 PM	H2 MFC set to  0.000000
4/3/2011	1:34:16 PM	BCl3 MFC set to  0.000000
4/3/2011	1:34:16 PM	PHl3 MFC set to  0.000000
4/3/2011	1:34:16 PM	SiCl4 MFC set to  0.000000
4/3/2011	1:34:16 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	1:34:16 PM	Tube furnace set to 0
4/3/2011	1:34:47 PM	Helium valve closed
4/3/2011	1:34:47 PM	H2 valve closed
4/3/2011	1:34:47 PM	BCl3 valve closed
4/3/2011	1:34:47 PM	PH3 valve closed
4/3/2011	1:34:47 PM	SiCl4 pre valve closed
4/3/2011	1:34:47 PM	SiCl4 post valve closed
4/3/2011	1:34:47 PM	Bubbler valve closed
4/3/2011	1:34:47 PM	Main Vac valve opened
4/3/2011	1:34:47 PM	Bypass valve opened
4/3/2011	1:34:47 PM	Helium MFC set to  0.000000
4/3/2011	1:34:47 PM	H2 MFC set to  0.000000
4/3/2011	1:34:47 PM	BCl3 MFC set to  0.000000
4/3/2011	1:34:47 PM	PHl3 MFC set to  0.000000
4/3/2011	1:34:47 PM	SiCl4 MFC set to  0.000000
4/3/2011	1:34:47 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	1:34:47 PM	Tube furnace set to 0
4/3/2011	1:34:47 PM	Run finished at 1:34 PM
4/3/2011	1:34:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	1:35:11 PM	Helium MFC set to  20.000000
4/3/2011	1:35:12 PM	Helium valve opened
4/3/2011	2:38:56 PM	Helium valve closed
4/3/2011	2:38:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2011	2:38:59 PM	Recipe started at 2:38 PM
4/3/2011	2:38:59 PM	H2 valve closed
4/3/2011	2:38:59 PM	BCl3 valve closed
4/3/2011	2:38:59 PM	PH3 valve closed
4/3/2011	2:38:59 PM	SiCl4 pre valve closed
4/3/2011	2:38:59 PM	SiCl4 post valve closed
4/3/2011	2:38:59 PM	Main Vac valve closed
4/3/2011	2:38:59 PM	Bypass valve closed
4/3/2011	2:38:59 PM	Bubbler valve closed
4/3/2011	2:38:59 PM	Helium valve opened
4/3/2011	2:38:59 PM	Helium MFC set to  500.000000
4/3/2011	2:38:59 PM	H2 MFC set to  0.000000
4/3/2011	2:38:59 PM	BCl3 MFC set to  0.000000
4/3/2011	2:38:59 PM	PHl3 MFC set to  0.000000
4/3/2011	2:38:59 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:38:59 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:38:59 PM	Tube furnace set to 0
4/3/2011	2:40:19 PM	Helium valve closed
4/3/2011	2:40:19 PM	H2 valve closed
4/3/2011	2:40:19 PM	BCl3 valve closed
4/3/2011	2:40:19 PM	PH3 valve closed
4/3/2011	2:40:19 PM	SiCl4 pre valve closed
4/3/2011	2:40:19 PM	SiCl4 post valve closed
4/3/2011	2:40:19 PM	Main Vac valve closed
4/3/2011	2:40:19 PM	Bypass valve closed
4/3/2011	2:40:19 PM	Bubbler valve closed
4/3/2011	2:40:19 PM	Helium MFC set to  0.000000
4/3/2011	2:40:19 PM	H2 MFC set to  0.000000
4/3/2011	2:40:19 PM	BCl3 MFC set to  0.000000
4/3/2011	2:40:19 PM	PHl3 MFC set to  0.000000
4/3/2011	2:40:19 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:40:19 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:40:20 PM	Tube furnace set to 0
4/3/2011	2:40:20 PM	Run finished at 2:40 PM
4/3/2011	2:40:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2011	2:42:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	2:42:44 PM	Recipe started at 2:42 PM
4/3/2011	2:42:44 PM	Helium valve closed
4/3/2011	2:42:44 PM	H2 valve closed
4/3/2011	2:42:44 PM	BCl3 valve closed
4/3/2011	2:42:44 PM	PH3 valve closed
4/3/2011	2:42:44 PM	SiCl4 pre valve closed
4/3/2011	2:42:44 PM	SiCl4 post valve closed
4/3/2011	2:42:44 PM	Main Vac valve closed
4/3/2011	2:42:44 PM	Bubbler valve closed
4/3/2011	2:42:44 PM	Bypass valve opened
4/3/2011	2:42:44 PM	Helium MFC set to  0.000000
4/3/2011	2:42:44 PM	H2 MFC set to  0.000000
4/3/2011	2:42:44 PM	BCl3 MFC set to  0.000000
4/3/2011	2:42:44 PM	PHl3 MFC set to  0.000000
4/3/2011	2:42:44 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:42:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:42:44 PM	Tube furnace set to 0
4/3/2011	2:43:15 PM	Helium valve closed
4/3/2011	2:43:15 PM	H2 valve closed
4/3/2011	2:43:15 PM	BCl3 valve closed
4/3/2011	2:43:15 PM	PH3 valve closed
4/3/2011	2:43:15 PM	SiCl4 pre valve closed
4/3/2011	2:43:15 PM	SiCl4 post valve closed
4/3/2011	2:43:15 PM	Bubbler valve closed
4/3/2011	2:43:15 PM	Main Vac valve opened
4/3/2011	2:43:15 PM	Bypass valve opened
4/3/2011	2:43:15 PM	Helium MFC set to  0.000000
4/3/2011	2:43:15 PM	H2 MFC set to  0.000000
4/3/2011	2:43:15 PM	BCl3 MFC set to  0.000000
4/3/2011	2:43:15 PM	PHl3 MFC set to  0.000000
4/3/2011	2:43:15 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:43:15 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:43:15 PM	Tube furnace set to 0
4/3/2011	2:43:16 PM	Run finished at 2:43 PM
4/3/2011	2:43:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	2:43:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/3/2011	2:43:41 PM	Recipe started at 2:43 PM
4/3/2011	2:43:41 PM	Helium valve closed
4/3/2011	2:43:41 PM	H2 valve closed
4/3/2011	2:43:41 PM	BCl3 valve closed
4/3/2011	2:43:41 PM	PH3 valve closed
4/3/2011	2:43:41 PM	SiCl4 pre valve closed
4/3/2011	2:43:41 PM	SiCl4 post valve closed
4/3/2011	2:43:41 PM	Main Vac valve closed
4/3/2011	2:43:41 PM	Bubbler valve closed
4/3/2011	2:43:41 PM	Bypass valve opened
4/3/2011	2:43:41 PM	Helium MFC set to  0.000000
4/3/2011	2:43:41 PM	H2 MFC set to  0.000000
4/3/2011	2:43:41 PM	BCl3 MFC set to  0.000000
4/3/2011	2:43:41 PM	PHl3 MFC set to  0.000000
4/3/2011	2:43:41 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:43:41 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:43:42 PM	Tube furnace set to 0
4/3/2011	2:43:42 PM	Helium valve closed
4/3/2011	2:43:42 PM	H2 valve closed
4/3/2011	2:43:42 PM	BCl3 valve closed
4/3/2011	2:43:42 PM	PH3 valve closed
4/3/2011	2:43:42 PM	SiCl4 pre valve closed
4/3/2011	2:43:42 PM	SiCl4 post valve closed
4/3/2011	2:43:42 PM	Bubbler valve closed
4/3/2011	2:43:42 PM	Main Vac valve opened
4/3/2011	2:43:42 PM	Bypass valve opened
4/3/2011	2:43:42 PM	Helium MFC set to  0.000000
4/3/2011	2:43:42 PM	H2 MFC set to  0.000000
4/3/2011	2:43:42 PM	BCl3 MFC set to  0.000000
4/3/2011	2:43:42 PM	PHl3 MFC set to  0.000000
4/3/2011	2:43:42 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:43:42 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:43:42 PM	Tube furnace set to 0
4/3/2011	2:44:42 PM	H2 valve closed
4/3/2011	2:44:42 PM	BCl3 valve closed
4/3/2011	2:44:42 PM	PH3 valve closed
4/3/2011	2:44:42 PM	SiCl4 pre valve closed
4/3/2011	2:44:42 PM	SiCl4 post valve closed
4/3/2011	2:44:42 PM	Bubbler valve closed
4/3/2011	2:44:42 PM	Helium valve opened
4/3/2011	2:44:42 PM	Main Vac valve opened
4/3/2011	2:44:42 PM	Bypass valve opened
4/3/2011	2:44:42 PM	Helium MFC set to  100.000000
4/3/2011	2:44:42 PM	H2 MFC set to  0.000000
4/3/2011	2:44:42 PM	BCl3 MFC set to  0.000000
4/3/2011	2:44:42 PM	PHl3 MFC set to  0.000000
4/3/2011	2:44:42 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:44:42 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:44:42 PM	Tube furnace set to 0
4/3/2011	2:45:42 PM	Helium valve closed
4/3/2011	2:45:42 PM	H2 valve closed
4/3/2011	2:45:42 PM	BCl3 valve closed
4/3/2011	2:45:42 PM	PH3 valve closed
4/3/2011	2:45:42 PM	SiCl4 pre valve closed
4/3/2011	2:45:42 PM	SiCl4 post valve closed
4/3/2011	2:45:42 PM	Bubbler valve closed
4/3/2011	2:45:42 PM	Main Vac valve opened
4/3/2011	2:45:42 PM	Bypass valve opened
4/3/2011	2:45:42 PM	Helium MFC set to  0.000000
4/3/2011	2:45:42 PM	H2 MFC set to  0.000000
4/3/2011	2:45:42 PM	BCl3 MFC set to  0.000000
4/3/2011	2:45:42 PM	PHl3 MFC set to  0.000000
4/3/2011	2:45:42 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:45:42 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:45:42 PM	Tube furnace set to 0
4/3/2011	2:46:42 PM	H2 valve closed
4/3/2011	2:46:42 PM	BCl3 valve closed
4/3/2011	2:46:42 PM	PH3 valve closed
4/3/2011	2:46:42 PM	SiCl4 pre valve closed
4/3/2011	2:46:42 PM	SiCl4 post valve closed
4/3/2011	2:46:42 PM	Bubbler valve closed
4/3/2011	2:46:42 PM	Helium valve opened
4/3/2011	2:46:42 PM	Main Vac valve opened
4/3/2011	2:46:42 PM	Bypass valve opened
4/3/2011	2:46:42 PM	Helium MFC set to  100.000000
4/3/2011	2:46:42 PM	H2 MFC set to  0.000000
4/3/2011	2:46:42 PM	BCl3 MFC set to  0.000000
4/3/2011	2:46:42 PM	PHl3 MFC set to  0.000000
4/3/2011	2:46:42 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:46:42 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:46:43 PM	Tube furnace set to 0
4/3/2011	2:47:43 PM	Helium valve closed
4/3/2011	2:47:43 PM	H2 valve closed
4/3/2011	2:47:43 PM	BCl3 valve closed
4/3/2011	2:47:43 PM	PH3 valve closed
4/3/2011	2:47:43 PM	SiCl4 pre valve closed
4/3/2011	2:47:43 PM	SiCl4 post valve closed
4/3/2011	2:47:43 PM	Bubbler valve closed
4/3/2011	2:47:43 PM	Main Vac valve opened
4/3/2011	2:47:43 PM	Bypass valve opened
4/3/2011	2:47:43 PM	Helium MFC set to  0.000000
4/3/2011	2:47:43 PM	H2 MFC set to  0.000000
4/3/2011	2:47:43 PM	BCl3 MFC set to  0.000000
4/3/2011	2:47:43 PM	PHl3 MFC set to  0.000000
4/3/2011	2:47:43 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:47:43 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:47:43 PM	Tube furnace set to 0
4/3/2011	2:48:43 PM	H2 valve closed
4/3/2011	2:48:43 PM	BCl3 valve closed
4/3/2011	2:48:43 PM	PH3 valve closed
4/3/2011	2:48:43 PM	SiCl4 pre valve closed
4/3/2011	2:48:43 PM	SiCl4 post valve closed
4/3/2011	2:48:43 PM	Bubbler valve closed
4/3/2011	2:48:43 PM	Helium valve opened
4/3/2011	2:48:43 PM	Main Vac valve opened
4/3/2011	2:48:43 PM	Bypass valve opened
4/3/2011	2:48:43 PM	Helium MFC set to  100.000000
4/3/2011	2:48:43 PM	H2 MFC set to  0.000000
4/3/2011	2:48:43 PM	BCl3 MFC set to  0.000000
4/3/2011	2:48:43 PM	PHl3 MFC set to  0.000000
4/3/2011	2:48:43 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:48:43 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:48:43 PM	Tube furnace set to 0
4/3/2011	2:49:43 PM	Helium valve closed
4/3/2011	2:49:43 PM	H2 valve closed
4/3/2011	2:49:43 PM	BCl3 valve closed
4/3/2011	2:49:43 PM	PH3 valve closed
4/3/2011	2:49:43 PM	SiCl4 pre valve closed
4/3/2011	2:49:43 PM	SiCl4 post valve closed
4/3/2011	2:49:43 PM	Bubbler valve closed
4/3/2011	2:49:43 PM	Main Vac valve opened
4/3/2011	2:49:43 PM	Bypass valve opened
4/3/2011	2:49:43 PM	Helium MFC set to  0.000000
4/3/2011	2:49:43 PM	H2 MFC set to  0.000000
4/3/2011	2:49:43 PM	BCl3 MFC set to  0.000000
4/3/2011	2:49:43 PM	PHl3 MFC set to  0.000000
4/3/2011	2:49:43 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:49:43 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:49:43 PM	Tube furnace set to 0
4/3/2011	2:50:43 PM	H2 valve closed
4/3/2011	2:50:43 PM	BCl3 valve closed
4/3/2011	2:50:43 PM	PH3 valve closed
4/3/2011	2:50:43 PM	SiCl4 pre valve closed
4/3/2011	2:50:43 PM	SiCl4 post valve closed
4/3/2011	2:50:43 PM	Bubbler valve closed
4/3/2011	2:50:43 PM	Helium valve opened
4/3/2011	2:50:43 PM	Main Vac valve opened
4/3/2011	2:50:43 PM	Bypass valve opened
4/3/2011	2:50:43 PM	Helium MFC set to  100.000000
4/3/2011	2:50:43 PM	H2 MFC set to  0.000000
4/3/2011	2:50:43 PM	BCl3 MFC set to  0.000000
4/3/2011	2:50:43 PM	PHl3 MFC set to  0.000000
4/3/2011	2:50:43 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:50:43 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:50:43 PM	Tube furnace set to 0
4/3/2011	2:51:43 PM	Helium valve closed
4/3/2011	2:51:43 PM	H2 valve closed
4/3/2011	2:51:43 PM	BCl3 valve closed
4/3/2011	2:51:43 PM	PH3 valve closed
4/3/2011	2:51:43 PM	SiCl4 pre valve closed
4/3/2011	2:51:43 PM	SiCl4 post valve closed
4/3/2011	2:51:43 PM	Bubbler valve closed
4/3/2011	2:51:43 PM	Main Vac valve opened
4/3/2011	2:51:43 PM	Bypass valve opened
4/3/2011	2:51:43 PM	Helium MFC set to  0.000000
4/3/2011	2:51:43 PM	H2 MFC set to  0.000000
4/3/2011	2:51:43 PM	BCl3 MFC set to  0.000000
4/3/2011	2:51:43 PM	PHl3 MFC set to  0.000000
4/3/2011	2:51:43 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:51:43 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:51:44 PM	Tube furnace set to 0
4/3/2011	2:52:44 PM	H2 valve closed
4/3/2011	2:52:44 PM	BCl3 valve closed
4/3/2011	2:52:44 PM	PH3 valve closed
4/3/2011	2:52:44 PM	SiCl4 pre valve closed
4/3/2011	2:52:44 PM	SiCl4 post valve closed
4/3/2011	2:52:44 PM	Bubbler valve closed
4/3/2011	2:52:44 PM	Helium valve opened
4/3/2011	2:52:44 PM	Main Vac valve opened
4/3/2011	2:52:44 PM	Bypass valve opened
4/3/2011	2:52:44 PM	Helium MFC set to  100.000000
4/3/2011	2:52:44 PM	H2 MFC set to  0.000000
4/3/2011	2:52:44 PM	BCl3 MFC set to  0.000000
4/3/2011	2:52:44 PM	PHl3 MFC set to  0.000000
4/3/2011	2:52:44 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:52:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:52:44 PM	Tube furnace set to 0
4/3/2011	2:53:44 PM	Helium valve closed
4/3/2011	2:53:44 PM	H2 valve closed
4/3/2011	2:53:44 PM	BCl3 valve closed
4/3/2011	2:53:44 PM	PH3 valve closed
4/3/2011	2:53:44 PM	SiCl4 pre valve closed
4/3/2011	2:53:44 PM	SiCl4 post valve closed
4/3/2011	2:53:44 PM	Bubbler valve closed
4/3/2011	2:53:44 PM	Main Vac valve opened
4/3/2011	2:53:44 PM	Bypass valve opened
4/3/2011	2:53:44 PM	Helium MFC set to  0.000000
4/3/2011	2:53:44 PM	H2 MFC set to  0.000000
4/3/2011	2:53:44 PM	BCl3 MFC set to  0.000000
4/3/2011	2:53:44 PM	PHl3 MFC set to  0.000000
4/3/2011	2:53:44 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:53:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:53:44 PM	Tube furnace set to 0
4/3/2011	2:54:44 PM	H2 valve closed
4/3/2011	2:54:44 PM	BCl3 valve closed
4/3/2011	2:54:44 PM	PH3 valve closed
4/3/2011	2:54:44 PM	SiCl4 pre valve closed
4/3/2011	2:54:44 PM	SiCl4 post valve closed
4/3/2011	2:54:44 PM	Bubbler valve closed
4/3/2011	2:54:44 PM	Helium valve opened
4/3/2011	2:54:44 PM	Main Vac valve opened
4/3/2011	2:54:44 PM	Bypass valve opened
4/3/2011	2:54:44 PM	Helium MFC set to  100.000000
4/3/2011	2:54:44 PM	H2 MFC set to  0.000000
4/3/2011	2:54:44 PM	BCl3 MFC set to  0.000000
4/3/2011	2:54:44 PM	PHl3 MFC set to  0.000000
4/3/2011	2:54:44 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:54:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:54:44 PM	Tube furnace set to 0
4/3/2011	2:55:44 PM	Helium valve closed
4/3/2011	2:55:44 PM	H2 valve closed
4/3/2011	2:55:44 PM	BCl3 valve closed
4/3/2011	2:55:44 PM	PH3 valve closed
4/3/2011	2:55:44 PM	SiCl4 pre valve closed
4/3/2011	2:55:44 PM	SiCl4 post valve closed
4/3/2011	2:55:44 PM	Bubbler valve closed
4/3/2011	2:55:44 PM	Main Vac valve opened
4/3/2011	2:55:44 PM	Bypass valve opened
4/3/2011	2:55:44 PM	Helium MFC set to  0.000000
4/3/2011	2:55:44 PM	H2 MFC set to  0.000000
4/3/2011	2:55:44 PM	BCl3 MFC set to  0.000000
4/3/2011	2:55:44 PM	PHl3 MFC set to  0.000000
4/3/2011	2:55:44 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:55:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:55:44 PM	Tube furnace set to 0
4/3/2011	2:56:44 PM	H2 valve closed
4/3/2011	2:56:44 PM	BCl3 valve closed
4/3/2011	2:56:44 PM	PH3 valve closed
4/3/2011	2:56:44 PM	SiCl4 pre valve closed
4/3/2011	2:56:44 PM	SiCl4 post valve closed
4/3/2011	2:56:44 PM	Bubbler valve closed
4/3/2011	2:56:44 PM	Helium valve opened
4/3/2011	2:56:44 PM	Main Vac valve opened
4/3/2011	2:56:44 PM	Bypass valve opened
4/3/2011	2:56:44 PM	Helium MFC set to  100.000000
4/3/2011	2:56:44 PM	H2 MFC set to  0.000000
4/3/2011	2:56:44 PM	BCl3 MFC set to  0.000000
4/3/2011	2:56:44 PM	PHl3 MFC set to  0.000000
4/3/2011	2:56:44 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:56:44 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:56:45 PM	Tube furnace set to 0
4/3/2011	2:57:45 PM	Helium valve closed
4/3/2011	2:57:45 PM	H2 valve closed
4/3/2011	2:57:45 PM	BCl3 valve closed
4/3/2011	2:57:45 PM	PH3 valve closed
4/3/2011	2:57:45 PM	SiCl4 pre valve closed
4/3/2011	2:57:45 PM	SiCl4 post valve closed
4/3/2011	2:57:45 PM	Bubbler valve closed
4/3/2011	2:57:45 PM	Main Vac valve opened
4/3/2011	2:57:45 PM	Bypass valve opened
4/3/2011	2:57:45 PM	Helium MFC set to  0.000000
4/3/2011	2:57:45 PM	H2 MFC set to  0.000000
4/3/2011	2:57:45 PM	BCl3 MFC set to  0.000000
4/3/2011	2:57:45 PM	PHl3 MFC set to  0.000000
4/3/2011	2:57:45 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:57:45 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:57:45 PM	Tube furnace set to 0
4/3/2011	2:58:45 PM	H2 valve closed
4/3/2011	2:58:45 PM	BCl3 valve closed
4/3/2011	2:58:45 PM	PH3 valve closed
4/3/2011	2:58:45 PM	SiCl4 pre valve closed
4/3/2011	2:58:45 PM	SiCl4 post valve closed
4/3/2011	2:58:45 PM	Bubbler valve closed
4/3/2011	2:58:45 PM	Helium valve opened
4/3/2011	2:58:45 PM	Main Vac valve opened
4/3/2011	2:58:45 PM	Bypass valve opened
4/3/2011	2:58:45 PM	Helium MFC set to  100.000000
4/3/2011	2:58:45 PM	H2 MFC set to  0.000000
4/3/2011	2:58:45 PM	BCl3 MFC set to  0.000000
4/3/2011	2:58:45 PM	PHl3 MFC set to  0.000000
4/3/2011	2:58:45 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:58:45 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:58:45 PM	Tube furnace set to 0
4/3/2011	2:59:45 PM	Helium valve closed
4/3/2011	2:59:45 PM	H2 valve closed
4/3/2011	2:59:45 PM	BCl3 valve closed
4/3/2011	2:59:45 PM	PH3 valve closed
4/3/2011	2:59:45 PM	SiCl4 pre valve closed
4/3/2011	2:59:45 PM	SiCl4 post valve closed
4/3/2011	2:59:45 PM	Bubbler valve closed
4/3/2011	2:59:45 PM	Main Vac valve opened
4/3/2011	2:59:45 PM	Bypass valve opened
4/3/2011	2:59:45 PM	Helium MFC set to  0.000000
4/3/2011	2:59:45 PM	H2 MFC set to  0.000000
4/3/2011	2:59:45 PM	BCl3 MFC set to  0.000000
4/3/2011	2:59:45 PM	PHl3 MFC set to  0.000000
4/3/2011	2:59:45 PM	SiCl4 MFC set to  0.000000
4/3/2011	2:59:45 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	2:59:45 PM	Tube furnace set to 0
4/3/2011	3:00:45 PM	H2 valve closed
4/3/2011	3:00:45 PM	BCl3 valve closed
4/3/2011	3:00:45 PM	PH3 valve closed
4/3/2011	3:00:45 PM	SiCl4 pre valve closed
4/3/2011	3:00:45 PM	SiCl4 post valve closed
4/3/2011	3:00:45 PM	Bubbler valve closed
4/3/2011	3:00:45 PM	Helium valve opened
4/3/2011	3:00:45 PM	Main Vac valve opened
4/3/2011	3:00:45 PM	Bypass valve opened
4/3/2011	3:00:45 PM	Helium MFC set to  100.000000
4/3/2011	3:00:45 PM	H2 MFC set to  0.000000
4/3/2011	3:00:45 PM	BCl3 MFC set to  0.000000
4/3/2011	3:00:45 PM	PHl3 MFC set to  0.000000
4/3/2011	3:00:45 PM	SiCl4 MFC set to  0.000000
4/3/2011	3:00:45 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	3:00:45 PM	Tube furnace set to 0
4/3/2011	3:01:45 PM	Helium valve closed
4/3/2011	3:01:45 PM	H2 valve closed
4/3/2011	3:01:45 PM	BCl3 valve closed
4/3/2011	3:01:45 PM	PH3 valve closed
4/3/2011	3:01:45 PM	SiCl4 pre valve closed
4/3/2011	3:01:45 PM	SiCl4 post valve closed
4/3/2011	3:01:45 PM	Bubbler valve closed
4/3/2011	3:01:45 PM	Main Vac valve opened
4/3/2011	3:01:45 PM	Bypass valve opened
4/3/2011	3:01:45 PM	Helium MFC set to  0.000000
4/3/2011	3:01:45 PM	H2 MFC set to  0.000000
4/3/2011	3:01:45 PM	BCl3 MFC set to  0.000000
4/3/2011	3:01:45 PM	PHl3 MFC set to  0.000000
4/3/2011	3:01:45 PM	SiCl4 MFC set to  0.000000
4/3/2011	3:01:45 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	3:01:46 PM	Tube furnace set to 0
4/3/2011	3:02:46 PM	H2 valve closed
4/3/2011	3:02:46 PM	BCl3 valve closed
4/3/2011	3:02:46 PM	PH3 valve closed
4/3/2011	3:02:46 PM	SiCl4 pre valve closed
4/3/2011	3:02:46 PM	SiCl4 post valve closed
4/3/2011	3:02:46 PM	Bubbler valve closed
4/3/2011	3:02:46 PM	Helium valve opened
4/3/2011	3:02:46 PM	Main Vac valve opened
4/3/2011	3:02:46 PM	Bypass valve opened
4/3/2011	3:02:46 PM	Helium MFC set to  100.000000
4/3/2011	3:02:46 PM	H2 MFC set to  0.000000
4/3/2011	3:02:46 PM	BCl3 MFC set to  0.000000
4/3/2011	3:02:46 PM	PHl3 MFC set to  0.000000
4/3/2011	3:02:46 PM	SiCl4 MFC set to  0.000000
4/3/2011	3:02:46 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	3:02:46 PM	Tube furnace set to 0
4/3/2011	3:03:46 PM	Helium valve closed
4/3/2011	3:03:46 PM	H2 valve closed
4/3/2011	3:03:46 PM	BCl3 valve closed
4/3/2011	3:03:46 PM	PH3 valve closed
4/3/2011	3:03:46 PM	SiCl4 pre valve closed
4/3/2011	3:03:46 PM	SiCl4 post valve closed
4/3/2011	3:03:46 PM	Bubbler valve closed
4/3/2011	3:03:46 PM	Main Vac valve opened
4/3/2011	3:03:46 PM	Bypass valve opened
4/3/2011	3:03:46 PM	Helium MFC set to  0.000000
4/3/2011	3:03:46 PM	H2 MFC set to  0.000000
4/3/2011	3:03:46 PM	BCl3 MFC set to  0.000000
4/3/2011	3:03:46 PM	PHl3 MFC set to  0.000000
4/3/2011	3:03:46 PM	SiCl4 MFC set to  0.000000
4/3/2011	3:03:46 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	3:03:46 PM	Tube furnace set to 0
4/3/2011	3:03:47 PM	Run finished at 3:03 PM
4/3/2011	3:03:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/3/2011	3:08:54 PM	Helium MFC set to  100.000000
4/3/2011	3:08:55 PM	Helium valve opened
4/3/2011	3:09:11 PM	Helium valve closed
4/3/2011	3:09:57 PM	Helium valve opened
4/3/2011	3:10:29 PM	Helium valve closed
4/3/2011	3:10:43 PM	Recipe started at 3:10 PM
4/3/2011	3:10:43 PM	Helium valve closed
4/3/2011	3:10:43 PM	BCl3 valve closed
4/3/2011	3:10:43 PM	PH3 valve closed
4/3/2011	3:10:43 PM	SiCl4 pre valve closed
4/3/2011	3:10:43 PM	SiCl4 post valve closed
4/3/2011	3:10:43 PM	Main Vac valve closed
4/3/2011	3:10:43 PM	Bypass valve closed
4/3/2011	3:10:43 PM	Bubbler valve closed
4/3/2011	3:10:43 PM	H2 valve opened
4/3/2011	3:10:43 PM	Helium MFC set to  0.000000
4/3/2011	3:10:43 PM	H2 MFC set to  500.000000
4/3/2011	3:10:43 PM	BCl3 MFC set to  0.000000
4/3/2011	3:10:43 PM	PHl3 MFC set to  0.000000
4/3/2011	3:10:43 PM	SiCl4 MFC set to  0.000000
4/3/2011	3:10:43 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	3:10:43 PM	Tube furnace set to 0
4/3/2011	3:12:05 PM	Helium valve closed
4/3/2011	3:12:05 PM	BCl3 valve closed
4/3/2011	3:12:05 PM	PH3 valve closed
4/3/2011	3:12:05 PM	SiCl4 pre valve closed
4/3/2011	3:12:05 PM	SiCl4 post valve closed
4/3/2011	3:12:05 PM	Main Vac valve closed
4/3/2011	3:12:05 PM	Bypass valve closed
4/3/2011	3:12:05 PM	H2 valve opened
4/3/2011	3:12:05 PM	Bubbler valve opened
4/3/2011	3:12:05 PM	Helium MFC set to  0.000000
4/3/2011	3:12:05 PM	H2 MFC set to  500.000000
4/3/2011	3:12:05 PM	BCl3 MFC set to  0.000000
4/3/2011	3:12:05 PM	PHl3 MFC set to  0.000000
4/3/2011	3:12:05 PM	SiCl4 MFC set to  0.000000
4/3/2011	3:12:05 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	3:12:06 PM	Tube furnace set to 1000
4/3/2011	3:32:06 PM	Helium valve closed
4/3/2011	3:32:06 PM	BCl3 valve closed
4/3/2011	3:32:06 PM	PH3 valve closed
4/3/2011	3:32:06 PM	Main Vac valve closed
4/3/2011	3:32:06 PM	Bypass valve closed
4/3/2011	3:32:06 PM	H2 valve opened
4/3/2011	3:32:06 PM	SiCl4 pre valve opened
4/3/2011	3:32:06 PM	SiCl4 post valve opened
4/3/2011	3:32:06 PM	Bubbler valve opened
4/3/2011	3:32:06 PM	Helium MFC set to  0.000000
4/3/2011	3:32:06 PM	H2 MFC set to  500.000000
4/3/2011	3:32:06 PM	BCl3 MFC set to  0.000000
4/3/2011	3:32:06 PM	PHl3 MFC set to  0.000000
4/3/2011	3:32:06 PM	SiCl4 MFC set to  50.000000
4/3/2011	3:32:06 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	3:32:06 PM	Tube furnace set to 1000
4/3/2011	3:52:06 PM	H2 valve closed
4/3/2011	3:52:06 PM	BCl3 valve closed
4/3/2011	3:52:06 PM	PH3 valve closed
4/3/2011	3:52:06 PM	SiCl4 pre valve closed
4/3/2011	3:52:06 PM	SiCl4 post valve closed
4/3/2011	3:52:06 PM	Main Vac valve closed
4/3/2011	3:52:06 PM	Bypass valve closed
4/3/2011	3:52:06 PM	Helium valve opened
4/3/2011	3:52:06 PM	Bubbler valve opened
4/3/2011	3:52:06 PM	Helium MFC set to  500.000000
4/3/2011	3:52:06 PM	H2 MFC set to  0.000000
4/3/2011	3:52:06 PM	BCl3 MFC set to  0.000000
4/3/2011	3:52:06 PM	PHl3 MFC set to  0.000000
4/3/2011	3:52:06 PM	SiCl4 MFC set to  0.000000
4/3/2011	3:52:06 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	3:52:06 PM	Tube furnace set to 0
4/3/2011	4:11:40 PM	H2 valve closed
4/3/2011	4:11:40 PM	BCl3 valve closed
4/3/2011	4:11:40 PM	PH3 valve closed
4/3/2011	4:11:40 PM	SiCl4 pre valve closed
4/3/2011	4:11:40 PM	SiCl4 post valve closed
4/3/2011	4:11:40 PM	Main Vac valve closed
4/3/2011	4:11:40 PM	Bypass valve closed
4/3/2011	4:11:40 PM	Helium valve opened
4/3/2011	4:11:40 PM	Bubbler valve opened
4/3/2011	4:11:40 PM	Helium MFC set to  500.000000
4/3/2011	4:11:40 PM	H2 MFC set to  0.000000
4/3/2011	4:11:40 PM	BCl3 MFC set to  0.000000
4/3/2011	4:11:40 PM	PHl3 MFC set to  0.000000
4/3/2011	4:11:40 PM	SiCl4 MFC set to  0.000000
4/3/2011	4:11:40 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	4:11:41 PM	Tube furnace set to 0
4/3/2011	4:11:43 PM	Helium valve closed
4/3/2011	4:11:43 PM	H2 valve closed
4/3/2011	4:11:43 PM	BCl3 valve closed
4/3/2011	4:11:43 PM	PH3 valve closed
4/3/2011	4:11:43 PM	SiCl4 pre valve closed
4/3/2011	4:11:43 PM	SiCl4 post valve closed
4/3/2011	4:11:43 PM	Main Vac valve closed
4/3/2011	4:11:43 PM	Bypass valve closed
4/3/2011	4:11:43 PM	Bubbler valve closed
4/3/2011	4:11:43 PM	Helium MFC set to  0.000000
4/3/2011	4:11:43 PM	H2 MFC set to  0.000000
4/3/2011	4:11:43 PM	BCl3 MFC set to  0.000000
4/3/2011	4:11:43 PM	PHl3 MFC set to  0.000000
4/3/2011	4:11:43 PM	SiCl4 MFC set to  0.000000
4/3/2011	4:11:43 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	4:11:43 PM	Tube furnace set to 0
4/3/2011	4:11:44 PM	Run finished at 4:11 PM
4/3/2011	4:13:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	4:13:14 PM	Recipe started at 4:13 PM
4/3/2011	4:13:14 PM	Helium valve closed
4/3/2011	4:13:14 PM	H2 valve closed
4/3/2011	4:13:14 PM	BCl3 valve closed
4/3/2011	4:13:14 PM	PH3 valve closed
4/3/2011	4:13:14 PM	SiCl4 pre valve closed
4/3/2011	4:13:14 PM	SiCl4 post valve closed
4/3/2011	4:13:14 PM	Main Vac valve closed
4/3/2011	4:13:14 PM	Bubbler valve closed
4/3/2011	4:13:14 PM	Bypass valve opened
4/3/2011	4:13:14 PM	Helium MFC set to  0.000000
4/3/2011	4:13:14 PM	H2 MFC set to  0.000000
4/3/2011	4:13:14 PM	BCl3 MFC set to  0.000000
4/3/2011	4:13:14 PM	PHl3 MFC set to  0.000000
4/3/2011	4:13:14 PM	SiCl4 MFC set to  0.000000
4/3/2011	4:13:14 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	4:13:14 PM	Tube furnace set to 0
4/3/2011	4:13:45 PM	Helium valve closed
4/3/2011	4:13:45 PM	H2 valve closed
4/3/2011	4:13:45 PM	BCl3 valve closed
4/3/2011	4:13:45 PM	PH3 valve closed
4/3/2011	4:13:45 PM	SiCl4 pre valve closed
4/3/2011	4:13:45 PM	SiCl4 post valve closed
4/3/2011	4:13:45 PM	Bubbler valve closed
4/3/2011	4:13:45 PM	Main Vac valve opened
4/3/2011	4:13:45 PM	Bypass valve opened
4/3/2011	4:13:45 PM	Helium MFC set to  0.000000
4/3/2011	4:13:45 PM	H2 MFC set to  0.000000
4/3/2011	4:13:45 PM	BCl3 MFC set to  0.000000
4/3/2011	4:13:45 PM	PHl3 MFC set to  0.000000
4/3/2011	4:13:45 PM	SiCl4 MFC set to  0.000000
4/3/2011	4:13:45 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	4:13:45 PM	Tube furnace set to 0
4/3/2011	4:13:45 PM	Run finished at 4:13 PM
4/3/2011	4:13:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	4:13:55 PM	Helium MFC set to  15.000000
4/3/2011	4:13:55 PM	Helium valve opened
4/3/2011	4:22:45 PM	Helium valve closed
4/3/2011	4:22:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2011	4:22:48 PM	Recipe started at 4:22 PM
4/3/2011	4:22:48 PM	H2 valve closed
4/3/2011	4:22:48 PM	BCl3 valve closed
4/3/2011	4:22:48 PM	PH3 valve closed
4/3/2011	4:22:48 PM	SiCl4 pre valve closed
4/3/2011	4:22:48 PM	SiCl4 post valve closed
4/3/2011	4:22:48 PM	Main Vac valve closed
4/3/2011	4:22:48 PM	Bypass valve closed
4/3/2011	4:22:48 PM	Bubbler valve closed
4/3/2011	4:22:48 PM	Helium valve opened
4/3/2011	4:22:48 PM	Helium MFC set to  500.000000
4/3/2011	4:22:48 PM	H2 MFC set to  0.000000
4/3/2011	4:22:48 PM	BCl3 MFC set to  0.000000
4/3/2011	4:22:48 PM	PHl3 MFC set to  0.000000
4/3/2011	4:22:48 PM	SiCl4 MFC set to  0.000000
4/3/2011	4:22:48 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	4:22:48 PM	Tube furnace set to 0
4/3/2011	4:24:06 PM	Helium valve closed
4/3/2011	4:24:06 PM	H2 valve closed
4/3/2011	4:24:06 PM	BCl3 valve closed
4/3/2011	4:24:06 PM	PH3 valve closed
4/3/2011	4:24:06 PM	SiCl4 pre valve closed
4/3/2011	4:24:06 PM	SiCl4 post valve closed
4/3/2011	4:24:06 PM	Main Vac valve closed
4/3/2011	4:24:06 PM	Bypass valve closed
4/3/2011	4:24:06 PM	Bubbler valve closed
4/3/2011	4:24:06 PM	Helium MFC set to  0.000000
4/3/2011	4:24:06 PM	H2 MFC set to  0.000000
4/3/2011	4:24:06 PM	BCl3 MFC set to  0.000000
4/3/2011	4:24:06 PM	PHl3 MFC set to  0.000000
4/3/2011	4:24:06 PM	SiCl4 MFC set to  0.000000
4/3/2011	4:24:06 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	4:24:07 PM	Tube furnace set to 0
4/3/2011	4:24:07 PM	Run finished at 4:24 PM
4/3/2011	4:24:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/3/2011	4:26:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	4:26:50 PM	Recipe started at 4:26 PM
4/3/2011	4:26:50 PM	Helium valve closed
4/3/2011	4:26:50 PM	H2 valve closed
4/3/2011	4:26:50 PM	BCl3 valve closed
4/3/2011	4:26:50 PM	PH3 valve closed
4/3/2011	4:26:50 PM	SiCl4 pre valve closed
4/3/2011	4:26:50 PM	SiCl4 post valve closed
4/3/2011	4:26:50 PM	Main Vac valve closed
4/3/2011	4:26:50 PM	Bubbler valve closed
4/3/2011	4:26:50 PM	Bypass valve opened
4/3/2011	4:26:50 PM	Helium MFC set to  0.000000
4/3/2011	4:26:50 PM	H2 MFC set to  0.000000
4/3/2011	4:26:50 PM	BCl3 MFC set to  0.000000
4/3/2011	4:26:50 PM	PHl3 MFC set to  0.000000
4/3/2011	4:26:50 PM	SiCl4 MFC set to  0.000000
4/3/2011	4:26:50 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	4:26:50 PM	Tube furnace set to 0
4/3/2011	4:27:20 PM	Helium valve closed
4/3/2011	4:27:20 PM	H2 valve closed
4/3/2011	4:27:20 PM	BCl3 valve closed
4/3/2011	4:27:20 PM	PH3 valve closed
4/3/2011	4:27:20 PM	SiCl4 pre valve closed
4/3/2011	4:27:20 PM	SiCl4 post valve closed
4/3/2011	4:27:20 PM	Bubbler valve closed
4/3/2011	4:27:20 PM	Main Vac valve opened
4/3/2011	4:27:20 PM	Bypass valve opened
4/3/2011	4:27:20 PM	Helium MFC set to  0.000000
4/3/2011	4:27:20 PM	H2 MFC set to  0.000000
4/3/2011	4:27:20 PM	BCl3 MFC set to  0.000000
4/3/2011	4:27:20 PM	PHl3 MFC set to  0.000000
4/3/2011	4:27:20 PM	SiCl4 MFC set to  0.000000
4/3/2011	4:27:20 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	4:27:21 PM	Tube furnace set to 0
4/3/2011	4:27:21 PM	Run finished at 4:27 PM
4/3/2011	4:27:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	4:27:32 PM	Helium MFC set to  15.000000
4/3/2011	4:27:42 PM	Helium valve opened
4/3/2011	4:27:43 PM	Helium valve closed
4/3/2011	4:27:53 PM	Helium valve opened
4/3/2011	5:03:37 PM	Helium valve closed
4/3/2011	5:04:30 PM	Recipe started at 5:04 PM
4/3/2011	5:04:30 PM	Helium valve closed
4/3/2011	5:04:30 PM	BCl3 valve closed
4/3/2011	5:04:30 PM	PH3 valve closed
4/3/2011	5:04:30 PM	SiCl4 pre valve closed
4/3/2011	5:04:30 PM	SiCl4 post valve closed
4/3/2011	5:04:30 PM	Main Vac valve closed
4/3/2011	5:04:30 PM	Bypass valve closed
4/3/2011	5:04:30 PM	Bubbler valve closed
4/3/2011	5:04:30 PM	H2 valve opened
4/3/2011	5:04:30 PM	Helium MFC set to  0.000000
4/3/2011	5:04:30 PM	H2 MFC set to  500.000000
4/3/2011	5:04:30 PM	BCl3 MFC set to  0.000000
4/3/2011	5:04:30 PM	PHl3 MFC set to  0.000000
4/3/2011	5:04:30 PM	SiCl4 MFC set to  0.000000
4/3/2011	5:04:30 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	5:04:30 PM	Tube furnace set to 0
4/3/2011	5:05:53 PM	Helium valve closed
4/3/2011	5:05:53 PM	BCl3 valve closed
4/3/2011	5:05:53 PM	PH3 valve closed
4/3/2011	5:05:53 PM	SiCl4 pre valve closed
4/3/2011	5:05:53 PM	SiCl4 post valve closed
4/3/2011	5:05:53 PM	Main Vac valve closed
4/3/2011	5:05:53 PM	Bypass valve closed
4/3/2011	5:05:53 PM	H2 valve opened
4/3/2011	5:05:53 PM	Bubbler valve opened
4/3/2011	5:05:53 PM	Helium MFC set to  0.000000
4/3/2011	5:05:53 PM	H2 MFC set to  500.000000
4/3/2011	5:05:53 PM	BCl3 MFC set to  0.000000
4/3/2011	5:05:53 PM	PHl3 MFC set to  0.000000
4/3/2011	5:05:53 PM	SiCl4 MFC set to  0.000000
4/3/2011	5:05:53 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	5:05:53 PM	Tube furnace set to 1000
4/3/2011	5:25:53 PM	Helium valve closed
4/3/2011	5:25:53 PM	BCl3 valve closed
4/3/2011	5:25:53 PM	PH3 valve closed
4/3/2011	5:25:53 PM	Main Vac valve closed
4/3/2011	5:25:53 PM	Bypass valve closed
4/3/2011	5:25:53 PM	H2 valve opened
4/3/2011	5:25:53 PM	SiCl4 pre valve opened
4/3/2011	5:25:53 PM	SiCl4 post valve opened
4/3/2011	5:25:53 PM	Bubbler valve opened
4/3/2011	5:25:53 PM	Helium MFC set to  0.000000
4/3/2011	5:25:53 PM	H2 MFC set to  500.000000
4/3/2011	5:25:53 PM	BCl3 MFC set to  0.000000
4/3/2011	5:25:53 PM	PHl3 MFC set to  0.000000
4/3/2011	5:25:53 PM	SiCl4 MFC set to  70.000000
4/3/2011	5:25:53 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	5:25:53 PM	Tube furnace set to 1000
4/3/2011	5:45:53 PM	H2 valve closed
4/3/2011	5:45:53 PM	BCl3 valve closed
4/3/2011	5:45:53 PM	PH3 valve closed
4/3/2011	5:45:53 PM	SiCl4 pre valve closed
4/3/2011	5:45:53 PM	SiCl4 post valve closed
4/3/2011	5:45:53 PM	Main Vac valve closed
4/3/2011	5:45:53 PM	Bypass valve closed
4/3/2011	5:45:53 PM	Helium valve opened
4/3/2011	5:45:53 PM	Bubbler valve opened
4/3/2011	5:45:53 PM	Helium MFC set to  500.000000
4/3/2011	5:45:53 PM	H2 MFC set to  0.000000
4/3/2011	5:45:53 PM	BCl3 MFC set to  0.000000
4/3/2011	5:45:53 PM	PHl3 MFC set to  0.000000
4/3/2011	5:45:53 PM	SiCl4 MFC set to  0.000000
4/3/2011	5:45:53 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	5:45:53 PM	Tube furnace set to 0
4/3/2011	6:10:01 PM	H2 valve closed
4/3/2011	6:10:01 PM	BCl3 valve closed
4/3/2011	6:10:01 PM	PH3 valve closed
4/3/2011	6:10:01 PM	SiCl4 pre valve closed
4/3/2011	6:10:01 PM	SiCl4 post valve closed
4/3/2011	6:10:01 PM	Main Vac valve closed
4/3/2011	6:10:01 PM	Bypass valve closed
4/3/2011	6:10:01 PM	Helium valve opened
4/3/2011	6:10:01 PM	Bubbler valve opened
4/3/2011	6:10:01 PM	Helium MFC set to  500.000000
4/3/2011	6:10:01 PM	H2 MFC set to  0.000000
4/3/2011	6:10:01 PM	BCl3 MFC set to  0.000000
4/3/2011	6:10:01 PM	PHl3 MFC set to  0.000000
4/3/2011	6:10:01 PM	SiCl4 MFC set to  0.000000
4/3/2011	6:10:01 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	6:10:02 PM	Tube furnace set to 0
4/3/2011	6:10:10 PM	Helium valve closed
4/3/2011	6:10:10 PM	H2 valve closed
4/3/2011	6:10:10 PM	BCl3 valve closed
4/3/2011	6:10:10 PM	PH3 valve closed
4/3/2011	6:10:10 PM	SiCl4 pre valve closed
4/3/2011	6:10:10 PM	SiCl4 post valve closed
4/3/2011	6:10:10 PM	Main Vac valve closed
4/3/2011	6:10:10 PM	Bypass valve closed
4/3/2011	6:10:10 PM	Bubbler valve closed
4/3/2011	6:10:10 PM	Helium MFC set to  0.000000
4/3/2011	6:10:10 PM	H2 MFC set to  0.000000
4/3/2011	6:10:10 PM	BCl3 MFC set to  0.000000
4/3/2011	6:10:10 PM	PHl3 MFC set to  0.000000
4/3/2011	6:10:10 PM	SiCl4 MFC set to  0.000000
4/3/2011	6:10:10 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	6:10:10 PM	Tube furnace set to 0
4/3/2011	6:10:10 PM	Run finished at 6:10 PM
4/3/2011	6:20:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	6:20:20 PM	Recipe started at 6:20 PM
4/3/2011	6:20:20 PM	Helium valve closed
4/3/2011	6:20:20 PM	H2 valve closed
4/3/2011	6:20:20 PM	BCl3 valve closed
4/3/2011	6:20:20 PM	PH3 valve closed
4/3/2011	6:20:20 PM	SiCl4 pre valve closed
4/3/2011	6:20:20 PM	SiCl4 post valve closed
4/3/2011	6:20:20 PM	Main Vac valve closed
4/3/2011	6:20:20 PM	Bubbler valve closed
4/3/2011	6:20:20 PM	Bypass valve opened
4/3/2011	6:20:20 PM	Helium MFC set to  0.000000
4/3/2011	6:20:20 PM	H2 MFC set to  0.000000
4/3/2011	6:20:20 PM	BCl3 MFC set to  0.000000
4/3/2011	6:20:20 PM	PHl3 MFC set to  0.000000
4/3/2011	6:20:20 PM	SiCl4 MFC set to  0.000000
4/3/2011	6:20:20 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	6:20:20 PM	Tube furnace set to 0
4/3/2011	6:20:52 PM	Helium valve closed
4/3/2011	6:20:52 PM	H2 valve closed
4/3/2011	6:20:52 PM	BCl3 valve closed
4/3/2011	6:20:52 PM	PH3 valve closed
4/3/2011	6:20:52 PM	SiCl4 pre valve closed
4/3/2011	6:20:52 PM	SiCl4 post valve closed
4/3/2011	6:20:52 PM	Bubbler valve closed
4/3/2011	6:20:52 PM	Main Vac valve opened
4/3/2011	6:20:52 PM	Bypass valve opened
4/3/2011	6:20:52 PM	Helium MFC set to  0.000000
4/3/2011	6:20:52 PM	H2 MFC set to  0.000000
4/3/2011	6:20:52 PM	BCl3 MFC set to  0.000000
4/3/2011	6:20:52 PM	PHl3 MFC set to  0.000000
4/3/2011	6:20:52 PM	SiCl4 MFC set to  0.000000
4/3/2011	6:20:52 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	6:20:52 PM	Tube furnace set to 0
4/3/2011	6:20:52 PM	Run finished at 6:20 PM
4/3/2011	6:20:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	6:21:03 PM	Helium MFC set to  200.000000
4/3/2011	6:21:06 PM	Helium valve opened
4/3/2011	6:21:07 PM	Helium valve closed
4/3/2011	6:21:09 PM	Helium valve opened
4/3/2011	6:21:12 PM	Helium valve closed
4/3/2011	6:21:16 PM	Helium valve opened
4/3/2011	6:21:21 PM	Helium valve closed
4/3/2011	6:22:14 PM	Helium valve opened
4/3/2011	6:22:23 PM	Helium valve closed
4/3/2011	6:23:00 PM	Helium MFC set to  30.000000
4/3/2011	6:23:00 PM	Helium valve opened
4/3/2011	6:24:17 PM	Helium valve closed
4/3/2011	6:24:48 PM	Helium valve opened
4/3/2011	6:25:15 PM	Helium valve closed
4/3/2011	6:25:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/3/2011	6:25:48 PM	Recipe started at 6:25 PM
4/3/2011	6:25:48 PM	Helium valve closed
4/3/2011	6:25:48 PM	H2 valve closed
4/3/2011	6:25:48 PM	BCl3 valve closed
4/3/2011	6:25:48 PM	PH3 valve closed
4/3/2011	6:25:48 PM	SiCl4 pre valve closed
4/3/2011	6:25:48 PM	SiCl4 post valve closed
4/3/2011	6:25:48 PM	Main Vac valve closed
4/3/2011	6:25:48 PM	Bypass valve closed
4/3/2011	6:25:48 PM	Bubbler valve closed
4/3/2011	6:25:48 PM	Helium MFC set to  0.000000
4/3/2011	6:25:48 PM	H2 MFC set to  0.000000
4/3/2011	6:25:48 PM	BCl3 MFC set to  0.000000
4/3/2011	6:25:48 PM	PHl3 MFC set to  0.000000
4/3/2011	6:25:48 PM	SiCl4 MFC set to  0.000000
4/3/2011	6:25:48 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	6:25:48 PM	Tube furnace set to 0
4/3/2011	6:25:49 PM	Run finished at 6:25 PM
4/3/2011	6:25:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/3/2011	6:26:05 PM	Helium MFC set to  50.000000
4/3/2011	6:26:05 PM	Helium valve opened
4/3/2011	6:29:48 PM	Helium valve closed
4/3/2011	6:29:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	6:29:55 PM	Recipe started at 6:29 PM
4/3/2011	6:29:55 PM	Helium valve closed
4/3/2011	6:29:55 PM	H2 valve closed
4/3/2011	6:29:55 PM	BCl3 valve closed
4/3/2011	6:29:55 PM	PH3 valve closed
4/3/2011	6:29:55 PM	SiCl4 pre valve closed
4/3/2011	6:29:55 PM	SiCl4 post valve closed
4/3/2011	6:29:55 PM	Main Vac valve closed
4/3/2011	6:29:55 PM	Bubbler valve closed
4/3/2011	6:29:55 PM	Bypass valve opened
4/3/2011	6:29:55 PM	Helium MFC set to  0.000000
4/3/2011	6:29:55 PM	H2 MFC set to  0.000000
4/3/2011	6:29:55 PM	BCl3 MFC set to  0.000000
4/3/2011	6:29:55 PM	PHl3 MFC set to  0.000000
4/3/2011	6:29:55 PM	SiCl4 MFC set to  0.000000
4/3/2011	6:29:55 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	6:29:55 PM	Tube furnace set to 0
4/3/2011	6:30:10 PM	Helium valve closed
4/3/2011	6:30:10 PM	H2 valve closed
4/3/2011	6:30:10 PM	BCl3 valve closed
4/3/2011	6:30:10 PM	PH3 valve closed
4/3/2011	6:30:10 PM	SiCl4 pre valve closed
4/3/2011	6:30:10 PM	SiCl4 post valve closed
4/3/2011	6:30:10 PM	Bubbler valve closed
4/3/2011	6:30:10 PM	Main Vac valve opened
4/3/2011	6:30:10 PM	Bypass valve opened
4/3/2011	6:30:10 PM	Helium MFC set to  0.000000
4/3/2011	6:30:10 PM	H2 MFC set to  0.000000
4/3/2011	6:30:10 PM	BCl3 MFC set to  0.000000
4/3/2011	6:30:10 PM	PHl3 MFC set to  0.000000
4/3/2011	6:30:10 PM	SiCl4 MFC set to  0.000000
4/3/2011	6:30:10 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	6:30:10 PM	Tube furnace set to 0
4/3/2011	6:30:11 PM	Run finished at 6:30 PM
4/3/2011	6:30:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/3/2011	6:31:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/3/2011	6:31:12 PM	Recipe started at 6:31 PM
4/3/2011	6:31:12 PM	Helium valve closed
4/3/2011	6:31:12 PM	H2 valve closed
4/3/2011	6:31:12 PM	BCl3 valve closed
4/3/2011	6:31:12 PM	PH3 valve closed
4/3/2011	6:31:12 PM	SiCl4 pre valve closed
4/3/2011	6:31:12 PM	SiCl4 post valve closed
4/3/2011	6:31:12 PM	Main Vac valve closed
4/3/2011	6:31:12 PM	Bypass valve closed
4/3/2011	6:31:12 PM	Bubbler valve closed
4/3/2011	6:31:12 PM	Helium MFC set to  0.000000
4/3/2011	6:31:12 PM	H2 MFC set to  0.000000
4/3/2011	6:31:12 PM	BCl3 MFC set to  0.000000
4/3/2011	6:31:12 PM	PHl3 MFC set to  0.000000
4/3/2011	6:31:12 PM	SiCl4 MFC set to  0.000000
4/3/2011	6:31:12 PM	Bypass solenoid MFC set to  0.000000
4/3/2011	6:31:12 PM	Tube furnace set to 0
4/3/2011	6:31:12 PM	Run finished at 6:31 PM
4/3/2011	6:31:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
